PiezoMotor Product Catalogue 2014 by PiezoMotor AB

Product Catalogue 2014/2015

CONTENT About PiezoMotor..................................................................... 5 Markets.................................................................................6-7 How it works.......................................................................8-11 Electronics........................................................................12-13 Motor Characteristics............................................................. 14 Glossary................................................................................. 15

PIEZO LEGS LINEAR Linear 6 N........................................................................... 16-19 Twin 20 N............................................................................ 20-23 Twin 40 N............................................................................ 24-27 Twin-C 20 N......................................................................... 28-31 Twin-C 40 N......................................................................... 32-35 Twin-C 300 N....................................................................... 36-39 Twin-C 450 N....................................................................... 40-43 Spring 15 N......................................................................... 44-47 Caliper 20 N........................................................................ 48-51

PIEZO LEGS ROTARY 30 mNm.............................................................................. 52-55 50 mNm.............................................................................. 56-59 80 mNm.............................................................................. 60-63 WavePlate........................................................................... 64-67

DRIVERS AND ENCODERS PMCM21.............................................................................. 68-69 PMCM31.............................................................................. 70-73 PMD101.............................................................................. 74-77 PMD104.............................................................................. 78-81 PMD206.............................................................................. 82-85 Encoders............................................................................. 86-89 Installation guidelines.......................................................90-94

ABOUT PIEZOMOTOR AB PiezoMotor is one of the world-leading developers and manufacturers of direct drive, micro motors based on piezoelectric materials. Simple, precise and very small, piezoelectric motors are replacing traditional electromagnetic motors when these no longer meet the demands. Piezo LEGS速 motors minimize total product size and deliver much greater precision. At the company head office in Uppsala Sweden we make sure to have full control from piezo powder to delivering the final motor. This means that within our facilities we have a team of developers designing our motors, a production team to manufacture the piezoceramic material and assemble the motors, and the sales team to support our customers and distributors. Across the world, there is an ever increasing need for small, strong motors. Miniaturization combined with precision is driven by demand for higher accuracy in manufacturing such as precision machinery and measuring tools. In the medical sector, we see analytical instruments and manipulators becoming more and more advanced and exact. The development of nano technology is further enhancing this development. In the semiconductor industry, there are continuous efforts to develop higher precision instruments in order to scale down devices on the silicon wafer. In many of these applications, conventional electrical motors do not meet the required features. Our small, strong motors are precise down to the nanometer range. In addition, it has instant response time and does not suffer from the backlash problems which no gearbox can escape from.

Markets Piezo LEGS® motors are very flexible. They find use in a wide range of applications and markets, a number of which are outlined below. OPTICS Moving mirrors and lenses in optical applications is a traditional PiezoMotor application. The motors’ open-loop and closed-loop operation makes them particularly attractive in this market. High resolution, high stiffness and high holding force – even without power applied – are additional key success factors. Our LTC type Piezo LEGS motors have dedicated solutions for different mirror mounts. We also offer customized solutions

SEMICON Trends in the semiconductor sector indicate a shift in focus from everfiner trace width to greater emphasis on advanced packaging. Production capabilities and throughput remain very important. Piezo LEGS motors deliver high throughput, thanks to fast settling times plus high stability and resolution. PiezoMotor continuously develops new products for this market – both motors and drivers. We know this sector. Its demanding environment is part of our everyday life. Most of our solutions are customized.

SEM/TEM Requirements for higher resolution and newer, faster automated sequences continue to drive motor and driver development in the SEM/ TEM sector. The extremely high resolution of Piezo LEGS motors matches this need perfectly. Fractions of an Ångström plus high stiffness and stability are combined with low heat dissipation into systems. Our motors are fully compatible with the vacuum environment. For the most demanding applications, they can be made completely non-magnetic.

FACTORY AUTOMATION This market is still in its early stages, but a steady increase in the use of Piezo LEGS motors is already evident. Driving forces include increasing demands on high-end assembly equipment plus smaller and smaller parts. Piezo LEGS motors are suitable for slow-speed, high-precision applications. We work together with many motion control specialists, mixing different technologies with Piezo LEGS motors and thereby building optimized motion solutions. Piezo LEGS motors perform well in many applications, but if other solutions appear better, e.g. those offered by our Faulhaber Group partner, we don’t hesitate to recommend them.

MEDTECH Compact high-resolution solutions are key success factors for many medtech applications such as probing and cell manipulation. Our motors find many uses here and their very fast settling time is much appreciated by end-users. Fast settling time, in combination with high resolution and slow-speed, makes Piezo LEGS solutions very competitive.

STAGE Linear and rotary stages are common building blocks in almost all of the markets mentioned above. PiezoMotor offers a wide range of products for motorizing stages. Our motors can be fully integrated for very compact solutions or mounted externally with a minimum of components. Moreover, Piezo LEGS technology makes it possible to replace an existing DC/ Brushless/Stepper solution with a high-resolution piezo alternative. Systems also require position sensors to provide feedback for closedloop operation. We offer sensors from Renishaw and MicroE Systems, and we help find the solution that best matches your application needs.

DEFENSE Military applications often require very robust solutions and even here, friction-based Piezo LEGS motors offer a very good fit. Friction-based motors can be subjected to impact or even being manually moved without any damage to the motor; if the force applied to the motor is higher than the holding force, it will just start sliding. Automatic locking without power consumption is a unique feature that makes our motors suitable for battery-operated equipment. In airborne applications, the very high force-to-weight ratio is also an important success factor.

CUSTOMIZED PRODUCTS Over the years, we have gained much experience with custom adaptations, both with mechanics and electronics. We have the building blocks, skills and experience to make motor solutions to meet your needs. We do in-house sub-assembly of full-motion systems (i.e. motor, guiding, encoder). Contact us to discuss details with our skilled engineers.

How it works OLD PHENOMENA USED IN NEW AND EXCITING WAYS The piezoelectric effect was discovered in the 1880’s by the Curie brothers. By applying voltage to a piezo electric material, they were able to change its shape. This effect has since been used in many applications; submarine sonars, ultra-sound equipment at hospitals, as well as loudspeakers, for example. A more recent application – piezo-actuated fuel injectors – has improved the fuel economy of modern cars and trucks. This would not be possible without robust piezo electric components able to endure billions of cycles in the harsh environment of the combustion engine. Until PiezoMotor demonstrated its first commercially available piezo motor in 2002, only a handful of manufacturers existed. Since then, the acceptance of piezo technology has increased dramatically and more and more customers are today enjoying the benefits that our motors deliver.

ROCHELLE SALT

AN OUTSTANDING SUCCESS STORY The conventional electromagnetic motor is one of the most successful industrial products of all times. Since its conception some 175 years ago, it has made inroads into every aspect of our lives. Today, close to 10 billion small electric motors are produced each year. What’s more, the numbers keep growing as new applications are added to the list. In the most basic modern car, for example, we find some 30 to 40 motors handling everything from adjusting rear-view mirrors to opening windows. In a luxury car, close to one hundred motors are used.

SO WHY DO WE NEED ANOTHER TYPE OF MOTOR? The answer is that for most applications we don’t; the well-proven electromagnetic motor will work just fine. But for a growing number of applications and products, this traditional solution has reached the end of the road. A new type of motor is replacing it – a piezoelectric motor – and the demand is growing. All underlying trends support this growth; we want smaller and smaller products, more and more portable devices with more features and longer battery life, plus greater energy efficiency and higher and higher precision.

PIEZO LEGS® MOTOR ELEMENT

PIEZO LEGS® TECHNOLOGY Piezo LEGS is in essence a walking machine constructed in one solid piece. Constructed so that each leg can be elongated as well as bent sideways, it moves incrementally by synchronizing the movement of each pair of its four legs, just as an animal would. Note that Piezo LEGS operates directly – there’s no need for gears or mechanical transmission, and the material itself is virtually impossible to wear out. Even if the motor moves incrementally in the nanometer range, it can still be very quick. By taking thousands of steps per second, it can cruise along at centimeter per second speeds.

How it moves STEP-BY-STEP Orange arrows show the direction of motion of each leg tip. They move as alternate pairs. White arrow show the movement of the rod.

All four legs are electrically activated. All are elongated.

The first pair of legs maintains contact with the rod and moves right. The second pair retracts. Their tips bend left.

The second pair now extends and repositions on the rod. Their tips move right. The first pair retracts and their tips bend left.

DIFFERENT TYPES OF PIEZO LEGS® MOTORS Piezo LEGS motors are designed for ‘move-and-hold’ applications where precision, minimal space, low energy consumption and simple mechanical design are important factors. As the motor is non-resonant, it is also very easy to scale up and down in size. Unlike resonant piezoelectric motors, which only operate at a given frequency, Piezo LEGS motors offer extraordinary speed dynamics. They can be operated at extremely low speeds (nanometers per second) up to 20 mm/second with full control in the complete dynamic range. A further unique feature is their ability to take extremely small steps (single nanometer range) in combination with long strokes. This means that one Piezo LEGS motor can often replace two motion systems – a DC-motor plus a piezo actuator, for example – without sacrificing performance. So what do you need to design and integrate a motion system based on Piezo LEGS? To start with, we offer standard Piezo LEGS motors in various sizes plus a range of drivers/controllers. We also help select suitable position sensors as well as guidance and/or design of the mechanical interface of the motor. Our experienced mechanical and electronic designers help you throughout the process.

LR80

LL10

The second pair of legs moves right.The first pair begins to elongate and move up towards the rod.

WHY USE AN ELECTROMECHANICAL PIEZO MOTOR INSTEAD OF A TRADITIONAL ELECTROMAGNETIC The electromagnetic motor has continuously improved since Michael Faraday converted electrical energy into mechanical motion in 1821. The principle has now reached a stage of very high refinement and precision and is the most widespread industrial product in the world. Piezo LEGS rely on an electro-mechanical principle rather than an electromagnetic one. So what are the differences and what benefits do you get by switching to the new technology? To answer these questions, let’s take a look at the basics of the different principles. The electromagnetic motor works by creating force through magnetic poles that repel each other. Electrical current fed through wound coils create a magnetic field, where polarity is sequentially reversed to make the rotor spin. Piezo LEGS instead works with direct friction drive; force is created by the inherent preload of the piezoceramic actuator legs in direct friction contact with the rotor or drive shaft. When the legs start walking they are always in mechanical contact. In the following text we will explain how this is beneficial.

RESPONSE AND SETTLING TIME When using a magnetic field to accelerate the rotor of a DC motor, you will always have lag due to inertia. More so, the electrical impedance in the windings of the motor will negatively affect the response time; it simply takes time to push current into the motor to create the electromagnetic field. When settling in on a target position with a DC motor you will have an overshoot and must deal with oscillation. The time to settle and the continuous dithering may be a killer for any precise application. Piezo LEGS motors work with direct friction drive and will hold the load tightly. Response and settling time is limited by the load and friction between the piezo actuators and the component to be moved. Responsiveness of the piezo actuators is instantaneous and settling time is much faster compared to any traditional motor technology.

LTC20

STIFFNESS In many high accuracy applications, motion stiffness is essential. A system designed for holding force by magnetic field is of course a bit spongy in its nature. Stiffness can be increased with different tricks, but in comparison with the Piezo LEGS the traditional motor technologies fall short. Piezo LEGS are firmly holding the rotor or the linear shaft, and consequently you will make use of the high stiffness of the ceramic material. With increasing motor size the level of stiffness will only get higher.

FORCE In relation to its size, the torque of a rotating electromagnetic motor or the force of a linear electromagnetic motor is much lower than for Piezo LEGS. This is especially significant in small diameter motors. That’s the reason why electromagnetic motors need a gearbox to create high force and torque. Piezo LEGS motors do not need gearboxes. Piezo LEGS is selflocking and will hold load even when powered off.

RESOLUTION, MINIMUM INCREMENTAL MOTION In precision positioning, the term Minimum Incremental Motion (MIM) is often used. This is the smallest practical mechanical motion on the outgoing axis. Traditionally, we always see a big difference between the MIM and the resolution, since the latter is more closely related to the smallest detectable motion. In contrast, Piezo LEGS dramatically decrease the gap between MIM and resolution, in many cases eliminating it entirely. Resolution is more dependent on the electronics and the position sensor; the limiting factor is not the motor itself. Piezo LEGS thus achieve resolution so high that traditional electromagnetic motors are not even close. You will be able to easily position on a sub-micron level, or even down to sub-nanometers. For the rotary Piezo LEGS we’re talking sub-microradians.

BACKLASH Backlash is another factor that creates a lot of problems in motion. To illustrate this, you simply have to look at an adjustable spanner in your workshop. Changing the moving direction of the adjustment screw and nothing happens at first because of the play in the mechanics. Motion is created, but only after some delay. This is also the case in all gearboxes as the force is applied on different sides of the gears. There are of course ways of minimizing the backlash in gears, but to have a completely backlash free motion you need the direct drive feature of Piezo LEGS; friction contact is always in place, and changing direction can be done without the slightest play.

LTC20 AND LTC40

ACCURACY Absolute accuracy is the maximum difference between absolute target position and actual position. As we have seen, accuracy is limited by backlash and nonlinearity of the drive mechanics, while other factors that contribute to inaccuracy include temperature drift. What is clear is that achieving the best accuracy requires direct drive and direct metrology systems. For best accuracy the only option is to have position feedback from the point of interest; you simply place the position encoder close to where you want to measure movement.

ENERGY CONSUMPTION Traditional electromagnetic motors use significant amounts of energy just to keep a motor in a fixed position. Continuous current generate heat in the windings of the DC motor, and can have very unwelcome effects, especially in high-end positioning. Switching off the current will cause the motor to loose its position. Piezo LEGS motors are by far less energy consuming. The capacitive load of the piezoceramic actuators means power is consumed only when moving. When at stand still the motor will hold position without any current draw. For point-to-point movements you will see a really efficient use of energy, and at stand still you will have no heat generation. More so, the torque/force Piezo LEGS can deliver for the amount of power consumed is remarkable.

CONCLUSION

LT40

Regardless of your application, it’s highly likely that your next development will have greater motion demands than the last. Many of the problems noted above will require a speedy solution. Switching to Piezo LEGS simply solves so many problems. In many cases, the improvement is dramatic. We see a fast-growing use of Piezo LEGS. More often than not, using one of our motors is no longer an optional alternative to the electromagnetic motor – it’s a necessity for driving product development forward.

Electronics Standard drive electronics for Piezo LEGS速 range from simple and low cost to advanced controllers for closed loop control. The motor is powered by signals below 50 V in amplitude, and custom drive circuitry can even run on battery.

Piezo LEGS motors can be used in different ways depending on the requirements of the particular application. Required resolution is always the key question. As its name implies, a Piezo LEGS motor takes steps to create motion and, just as in humans, it can walk in different ways. It can move fast or slow, take long steps, short steps or partial steps, and stop at any point. All accomplished by different movement patterns and frequencies of the legs. If we study one of the piezoceramic legs in detail, the actuator is built like a bimorph (Figure 1). Left and right side of the leg can be independently activated (0-48V). When energized, the leg can extend and bend a few microns. The tip of the leg (i.e. the friction drive pad) can move to any point within the rhombic area as illustrated in Figure 1. When the leg is not energized, the tip of the leg will be at point a. When only activating one side of the leg, it will bend to the left or to the right (b or d respectively). With both sides of the leg fully activated, it will extend to its maximum height (at point c). A Piezo LEGS motor will have several actuator legs working together. The motion of the motor will be dependent of the input electrical waveform signals. To achieve motion, two legs (or more) are driven in parallel. In total, each motor will need four separate control signals. Each leg, however, is controlled with two voltages. In Figure 2 two different waveforms are depicted. Rhomb is a rudimentary waveform which will make the tip of the leg move in a rhombic pattern. A more advanced waveform is called Delta. The Delta waveform is optimized for smoothest walking, and is best for high precision positioning.

d a a

0,59

0,39

0,19

0,5

1,5

2,5

3,5

time

-0,01

500

1000

1500

2000

time

0,99

0,79 0,79

0,59 0,59

0,39 0,39

0,19 0,19

-0,01

0,5

1,5

2,5

3,5

time

-0,01

1000

1500

2000

time

FIGURE 2. Voltage plots; waveform Rhomb (left), and waveform Delta (right). The two input signals (U1 and U2) will control each separate half of the bimorph leg. Resulting plots describe the motion of the tip of the leg for given waveform type.

FIGURE 1. Element movement

0,79

0,99

0,79

c c

0,99

-0,01

PMCM21

PMCM31

PMD101

For each waveform period the leg will complete one revolution; it will take a full step, also defined as a waveform-step (wfm-step). With fine control of the generated waveform, it is possible to divide the full wfm-step in to smaller increments; so called microsteps. The movement of individual legs is almost linear with the applied voltage. The piezo actuator leg is an analog component, and will move approximately 50 pm/mV. In other words, if the microstep voltage is controlled on mV level, the resolution of incremental motion is ~50 picometers (50â&#x20AC;˘10-12 m). For practical reasons we have limited our standard microstepping drive electronics to microsteps of nanometer size (1â&#x20AC;˘10-9 m). The piezo actuator legs can be regarded as pure capacitors. To hold the legs in a given position you need to keep the voltage stable. At stand still there is no power draw or heat generation in the piezo. When holding position the motor can respond instantaneous and compensate the slightest deviation by taking nanometer sized microsteps. The amount of energy consumed by the Piezo LEGS depends on the size of the motor. For example, the linear 6 N motor consumes only 5 mW per wfm-step, of which â&#x2030;¤10% is lost as heat in the piezo. Like other ceramic capacitors the piezo actuator is temperature dependent; capacitance is increasing with temperature. Increase in temperature can be due to ambient changes or operation of the motor. Consequently, with increased temperature the motor will consume more power and put a higher capacitive load on the driver amplifier.

CUSTOMIZED ELECTRONICS

PMD104

In many applications, it is advantageous for users to integrate the drive electronics into their own system. PiezoMotor is fully open with information about how to control the motion of Piezo LEGS, and will support those who decide to make customized electronics. We do however encourage customers to start using our motors with drivers/ controllers supplied by us. Standard drive electronics are available for Piezo LEGS motors both from PiezoMotor as well as from independent suppliers. They range from very simple and low cost to very advanced. See our web page for guidance or contact us for recommendations.

SENSOR Many Piezo LEGS applications will require position sensors/encoders. We will help you make the correct choice. Sensors that fit our motors are available in standard as well as custom version from several independent suppliers. If you want the sensors integrated at the factory, just contact us for further assistance.

PMD206

Motor Characteristics Piezo LEGS® linear and rotary motors positions down to nanometer range if required. We talk about taking steps but in a different way from traditional stepper motors.

EXAMPLE LT20 motor, no load, 2000 wfm-steps per second Waveform Rhomb: ~5 µm x 2 kHz = ~10 mm/s Waveform Delta: ~3.5 µm x 2 kHz = ~7 mm/s EXAMPLE LT20 motor, 10 N load, 2000 wfm-steps per second Waveform Rhomb: ~4 µm x 2 kHz = ~8 mm/s Waveform Delta: ~2.5 µm x 2 kHz = ~5 mm/s Fine positioning is achieved through dividing the wfm-step into discrete points; so called microsteps. The resolution will be a combination of the number of points in the waveform and the external load. For example, a full wfm-step of 4 µm can be divided into 8192 microsteps that are only ~0.0005 µm (~0.5 nm). The resolution of the motor is all dependent of the electronics and how well they can manage the discrete voltage levels of the waveform.

WFM-STEP LENGTH [µm]

In this catalogue you will find detailed information about the standard products from PiezoMotor. Piezo LEGS are non-resonant walking motors; in several aspects quite different from DC or stepper motors. A Piezo LEGS motor is friction based, meaning the motion is transferred through contact friction between the drive leg and the drive rod/disc. You cannot rely on each step being equal to the next. This is especially true if the motor is operated under varying loads. For each waveform cycle of the drive signal, the motor will take one full step, referred to as a waveform-step (wfm-step). There is dependence between external load on motor and wfm-step length. When external load is high the wfm-step length is reduced. For example, see performance curve of LT20 type motor in Figure 3. At zero external load the typical wfm-step length is ~5 µm, but as load is increased the wfm-step length is shortened one or a few microns when working against load. In opposite, and not shown in diagram, the wfm-step length will be increased one or a few microns when working with load. It should be noted that the wfm-step length will also depend on internal piezo temperature, and on the type of waveform. The wfm-step length, as described above, can be used to calculate the approximate motor speed. Wfm-step length at a given load is multiplied with the frequency of the drive signal waveform.

EXTERNAL FORCE [N]

Figure 3. Waveform-step versus external load for LT20 motor. The filled line shows typical curve for waveform Rhomb, and dotted line waveform Delta. Values are typical for room temperature, and mean values for the motor type. Statistical spread is not shown.

Glossary WFM-STEP Waveform-step; the step taken for one full waveform period. Step size is load and temperature dependent. Typical load dependence curve is given for each motor.

MICROSTEP An incremental step within the full wfm-step. The size of the microstep will give the resolution of the motor. For a linear motor the microstep can be sub-nanometer.

WAVEFORM The shape and form of the electrical signals which controls the Piezo LEGS. Waveform Rhomb and Delta are commonly used, and will give different behavior in terms of speed, microstepping performance etc.

STEP LENGTH Linear travel, specified for full wfm-steps in load dependence curve. In specification tables the value is also given for a single microstep.

STEP ANGLE Rotary motion, angular displacement for full wfm-step in load dependence curve. In specification tables the value is also given for a single microstep.

RESOLUTION The piezo actuator legs are analog components which bend to move the drive rod or to rotate the drive disc. Resolution depends only on how well you control the voltage levels of the control signals. It is never difficult to get extreme resolution with the Piezo LEGS.

RECOMMENDED OPERATING RANGE The range of external load recommended for best microstepping performance and life time. Motor will handle higher loads, but the linearity within the wfm-step is impaired.

STALL FORCE / STALL TORQUE Maximum allowed external force / torque that the motor can handle and still give motion.

HOLDING FORCE / HOLDING TORQUE Motor will be able to hold this force / torque without slippage.

Piezo LEGS速 Linear 6N

Piezo LEGS® Linear 6N

Direct drive – backlash free Nanometer resolution Simple drive electronics No power draw in hold position Quick response and high speed dynamics

LL10 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration. Very high speed dynamics and nanometer resolution makes it ideal for numerous applications. Piezo LEGS technology is characterized by its outstanding precision. Fast speed and quick response time, as well as long service life are other benefits. In combination with the nano meter resolution the technology is quite unique.

in hold position it does not consume any power. Drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash. LL10 linear motor is available in a standard version, and in a non-magnetic vacuum version.

The motor is ideally suited for move and hold applications or for automatic adjustments. When

Ordering information Motors LL1011A-

Stainless Steel

LL1011D-

Non-Magnetic Vacuum

Drivers and Controllers PMCM21

Handheld push button driver

PMCM31

Analogue driver

PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

Linear Encoders See page 87

10,8

23,3

Main Dimensions LL1011A

Electrical Connector Types

Stainless Steel

3 9

3 ±0,05 0

103,3 22

4,2

Vacuum type motor has soldered cables with one connectors of type JST 05SR-3S. 4

17,5

23,3

GND Phase 4 Phase 3 Phase 2 Phase 1

10 -0,2

4x M1,6 10,8

10,8

17,5

+0,2 19 - 0,5

Standard type motor has one connector of type JST BM05B-SRSS-TB.

L ±1

4 ±0,1

1 Phase 1 Yellow 17

Phase 2 Green Phase 3 White Phase 4 Grey GND Black

3,3

Unless otherwise stated, motor is supplied with 2x JST 05SR-3S Connector

6 1,6

Unless otherwise stated, motor is supplied with JST 05SR-3S Connector

Electrical connections

,5 11

Phase 4 GND Name

Phase 3 Phase 2 Phase 1

Terminal

Cable Color

Phase 1

Yellow

Phase 2

Green

Phase 3

White

Phase 4

Grey

Ground (GND)

Black or brown

+0,2 19 - 0,5

Pin Assignment

Phase 1 Yellow Phase 2 Green Phase 3 White Phase 4 Grey GND Black

5,5

REV.

LT20-10 SS M3

02.06

-.02

Part No

Name

102070

REV.

LT20-10 SSV M3

Mechanical Adapter

Non-Magnetic Vacuum

3 ±0,05

6 1,6

10 -0,2

+0,1 19,3 - 0,5

4x M1,6

10,8

-.04

Main Dimensions LL1011D

2 10,8

4,2

+0,2

REV.

10 22

1,6 M1,6x4

L ±1

4 ±0,1

Unless othe with JST 05

Note: Refer to drawings for details. Read Installation Guidelines carefully.

15,5

Part No

3333

LL10-11-SS

Part No

REV.

M1,6x4

Drive rod can be fastened using a mechanical 1,8 adapter with sheet metal extender. 4 15,5 Please read Installation Guidelines carefully for notes on how to properly connect the Piezo LEGS motor. Disregarding the instructions given in the guideline Name REV. document may impair both motor performance as well as life time.

3333

-.06

1,8 4

-.02

Name

LL10-11-SS

REV.

-.02

Piezo LEGS® Linear 6N Technical Specification Type

LL1011A-

Maximum Stroke Speed Range Step Length

stainless steel

non-magnetic vacuum

LL1011D-

Unit

Note

80 (L−20.8)

100.8 mm rod, no mechanical adapter

0-15

mm/s

recommended, no load

µm

one wfm-step

µm

one microstep

0.0005

Resolution

0.0005

Recommended Operating Range

0-3

Stall Force

driver dependent

0-3

for best microstepping performance and life time

6.5

Holding Force

Vacuum

10-7

torr

mW/Hz

=0.5 W at 100 Hz wfm-step frequency

JST BM05B-SRSS-TB

soldered cable w. JST 05SR-3S

Mechanical Size

22 x 19 x 10.8

22 x 19.3 x 10.8

see drawing for details

Material in Motor Housing

Stainless Steel

Non-Magnetic approximate

Maximum Voltage Power Consumption Connector

Weight Operating Temp.

gram

−20 to +70

ºC Note: All specifications are subject to change without notice.

a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC. b. Typical values for waveform Delta, 3 N load, temperature 20ºC. c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. d. At temperature 20ºC, intermittent runs.

Item no.

Motor Performance

LL1011A-

Stall force 10 = 6.5 N

Version

Motor type A = SS / Stainless Steel D = NMV / Non-Magnetic Vacuum Drive rod (standard 030 = 30 mm 040 = 40 mm 050 = 50 mm

lengths) 060 = 60 mm 070 = 70 mm 101 = 100.8 mm

Mechanical adapter A0 = No adapter D1 = One adapter - Front Connector/Cable Motor type A A00 = JST connector, no cable A05 = Same as K05 A15 = Same as K15 K05 = 0.5 m cable for driver PMD101 and PMCM31 K15 = 1.5 m cable for driver PMD101 and PMCM31 L05 = 0.5 m cable-kit for driver PMD206 and PMD236 L15 = 1.5 m cable-kit for driver PMD206 and PMD236 Motor type D

WFM-STEP LENGTH [µm]

Family name LEGS Linear

Rhomb Delta

5 4 3 2 1 0

EXTERNAL FORCE [N]

Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). Wfm-step length is the average distance the drive rod moves when the legs take one wfm-step (i.e. for one waveform cycle). Note: Standard deviation σ of 0.5 µm should be taken into account. Typical values are given for 20ºC.

B10 = 1.0 m Teflon flying wires PTFE AWG28 for connection to driver PMD101 and PMCM31 For connection to driver PMD206 or PMD236 you need a D-sub adapter, p/n CK6280. Note: All combinations are not possible!

Please visit our website for the latest updates and to download CAD files

Piezo LEGS速 Linear Twin 20N

Piezo LEGSÂŽ Linear Twin 20N

Direct drive â&#x20AC;&#x201C; backlash free Nanometer resolution Simple drive electronics No power draw in hold position Quick response and high speed dynamics

LT20 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration. Very high speed dynamics and nanometer resolution makes it ideal for numerous applications. Piezo LEGS technology is characterized by its outstanding precision. Fast speed and quick response time, as well as long service life are other benefits. In combination with the nanometer resolution the technology is quite unique.

When in hold position it does not consume any power. Drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash. LT20 linear motor is available in standard version, vacuum version, and nonmagnetic vacuum version.

The motor is ideally suited for move and hold applications or for automatic adjustments.

Ordering information Motor Types LT2010A-/20A-

Stainless steel

LT2010B-/20B-

Stainless steel vacuum

LT2010D-/20D-

Non-magnetic vacuum

Drivers and Controllers PMCM21

Handheld push button driver

PMCM31

Analogue driver

PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

Linear Encoders See page 87

10,8

23,3

Main Dimensions LT2010 A

Electrical Connector Types

Stainless Steel

10,8

GND Phase 4 Phase 3 Phase 2 Phase 1

17,5

Standard type motor has two connectors of type JST BM05B-SRSS-TB.

23,3

3,3

Vacuum type motor has soldered cables with two connectors of type JST 05SR-3S.

10,8

22 4

23,3

17,5

1 Phase 1 Yellow

6 1,6

,5 Main Dimensions LT2010 B/D

Stainless Steel Vacuum / Non-Magnetic Vacuum Name

Phase 2

Green

Phase 3

White

Phase 4

Grey

Ground (GND)

Black or brown

23,3

10,8

21,8

Name

REV.

02.06

LT20-10 SS M3 17,5

101747

Mechanical Adapter

3 ±0,05

10,8

-.04

3,3 L

REV.

LT20-10 SSV M3

1,6

3,3 L

17,5

14,6

Mounting Options 4 ±0,1

There are two mounting options available, either for M3 screws (Ø3.3 mm holes), as seen above, or a slim version for M1.6 screws (Ø1.7 mm holes), see below. 14

14,6 17,5

Name

REV.

1,7

Phase 1 Yellow Phase 2 Green Phase 3 White Phase 4 Grey GND Black

Drive rod can be fastened using mechanical adapter sheet metal extender. Unlessaotherwise stated, motor with is supplied Part No Name 2x JST 05SR-3S In this figure the adapter is with mounted in frontConnector end of drive rod. Please read 101747 Guidelines carefully LT20-10 SSon M3 Installation for notes how to properly connect the Piezo LEGS motor. Disregarding the instructions given in the guideline document may impair both motor performance as well as life time.

Note: Refer to drawings for details. Read Installation Guidelines carefully.

14 M3 LT20-10 SSV

6 1,6

Yellow

Name

,5 102070 15

Part No

Cable Color

Phase 1

02.06

Part No

102070

Terminal

REV.

LT20-10 SS M3

Part No

17,5

10,8

Pin 23,3 Assignment

3,3

Phase 3 White GND Phase 4 Grey Phase 4 GND Black Phase 3 Unless otherwise stated, motor is supplied with 2x JST 05SR-3S Connector Phase 2 Phase 1

Phase 2 Green

3,3

17,5

-.04

02.0

Piezo LEGS® Linear Twin 20N Technical Specification Type

10A/20A

10B/20B vacuum

non-magnetic vacuum

10D/20D

Unit

Note

80 (L−20.8)

100.8 mm drive rod, no mechanical adapter

0-10

mm/s

recommended

2.5

µm

one wfm-step

µm

one microstep

stainless steel

Maximum Stroke Speed Range Step Length

0.0003

Resolution

driver dependent

Recommended Operating Range

0-10

for best microstepping performance and life time

Stall Force

Holding Force

10-7

torr

Vacuum Maximum Voltage Power Consumption

mW/Hz

=1 W at 100 Hz wfm-step frequency

see drawing for details

approximate

Connector

2 x JST BM05B- soldered cable w. soldered cable w. SRSS-TB 2 x JST 05SR-3S 2 x JST 05SR-3S

Mechanical Size

22 x 21 x 10.8

Material in Motor Housing

Stainless Steel

Weight Operating Temp.

22 x 21 x 10.8 Non-magnetic

gram

−20 to +70

ºC Note: All specifications are subject to change without notice.

a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC. b. Typical values for waveform Delta, 10 N load, temperature 20ºC. c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. d. At temperature 20ºC, intermittent runs.

Item no.

Motor Performance

LT2010A-050D1A00

Family name LEGS Linear Twin Stall force 20 = 20 N

Motor type A = SS / Stainless Steel B = SSV / Stainless Steel Vacuum D = NMV / Non-Magnetic Vacuum lengths) 060 = 60 mm 070 = 70 mm 101 = 100.8 mm

Mechanical adapter A0 = No adapter D1 = One adapter - Front D2 = One adapter - Back E1 = Two adapters - Front and back Connector/Cable Motor type A A00 = JST connectors, no cables A05 = 0.5 m cables * A15 = 1.5 m cables * K05 = 0.5 m cable-kit for driver PMD101 and PMCM31 K15 = 1.5 m cable-kit for driver PMD101 and PMCM31 L05 = 0.5 m cable-kit for driver PMD206 and PMD236 L15 = 1.5 m cable-kit for driver PMD206 and PMD236

WFM-STEP LENGTH [µm]

Version 10 = mounts with M3 screws 20 = mounts with M1.6 screws

Drive rod (standard 030 = 30 mm 040 = 40 mm 050 = 50 mm

Rhomb Delta

EXTERNAL FORCE [N]

Motor type B and D B10 = 1.0 m Teflon flying wires PTFE AWG28 For connection to driver PMD101 or PMCM31 you need an additional cable-kit, p/n CK6281. For connection to driver PMD206 or PMD236 you need a D-sub adapter, p/n CK6280. * = does not connect directly to either PM driver Note: All combinations are not possible!

Please visit our website for the latest updates and to download CAD files

Piezo LEGS速 Linear Twin 40N

Piezo LEGSÂŽ Linear Twin 40N

Direct drive â&#x20AC;&#x201C; backlash free Nanometer resolution Simple drive electronics No power draw in hold position Quick response and high speed dynamics

LT40 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration. Very high speed dynamics and nanometer resolution makes it ideal for numerous applications. Piezo LEGS technology is characterized by its outstanding precision. Fast speed and quick response time, as well as long service life are other benefits. In combination with the nanometer resolution the technology is quite unique.

When in hold position it does not consume any power. Drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash. LT40 linear motor is available in a standard version and in a vacuum version.

The motor is ideally suited for move and hold applications or for automatic adjustments.

Ordering information Motors LT4010A-/20A-

Stainless steel

LT4010B-/20B-

Stainless steel vacuum

Drivers and Controllers PMCM21

Handheld push button driver

PMCM31

Analogue driver

PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

Linear Encoders See page 87

3 22

23,3

10,8

Main Dimensions LT4020A

Electrical Connector Types

Stainless Steel

3,3 L

Vacuum type motor has soldered cables with two connectors of type JST 05SR-3S. 4

32,1

17,5

14 23,1

9 3 10

23,3

25,1

10,8

GND Phase 4 Phase 3 Phase 2 Phase 1

17,5

Standard type motor has one connector of type JST BM05B-SRSS-TB.

1 Phase 1 Yellow Phase 2 Green Phase 3 White Phase 4 Grey GND Black

3,3 L 5,3 19,1

Unless otherwise stated, motor is supplied with 2x JST 05SR-3S Connector 2,1

Pin Assignment

5,5

6 1,6

Main Dimensions LT4020B

,5 11

Stainless Steel Vacuum Name

Terminal

Cable Color

Phase 1

Yellow

Phase 2

Green

Phase 3

White

Phase 4

Grey

Ground (GND)

Black or brown

REV.

PvM

2013-11-20

LHR

2013-11-20

Name

102070 DO NOT SCALE DRAWING

DRAWING

APPROVED

SIZE DWG. NO.

PvM 2013-11-20 LT20-10 SSV M3 A3

SCALE

02.06

2:1

CAD FILE:

14 23,1

100375

100375 LT40-20 SS M2 01

25,1

Part FINISH No

REVIEWED

REVISED

MATERIAL

LT20-10 SS M3

REV.

REV. SHEET

-.04

01 OF

Mechanical Adapter

14 23,1

32,1

Cable side 8 5,3 19,1

2,1

1,65

2,5

0,5

25,1

Note: Refer to drawings for details. Read Installation Guidelines carefully. 14 26,7

Mounting side

Drive rod can be fastened using a mechanical adapter with sheet metal extender. In this figure the adapter is mounted in front end of drive rod. Please read Installation Guidelines carefully for notes on how to properly connect the Piezo LEGS motor. Disregarding the instructions given in the guideline document may impair both motor performance as well as life time.

32,1

MAT

THREADS ARE: ISO 965-1,2 6H/6g

PvM 2013-08-15 LT40-20 SSV M2 REVISED LT4020B There are two mounting options available, either a slim version for M2 screws REVIEWED LHR 2013-11-25 (Ø2.1 mm holes), as seen FINISH above, or a version for M3 screws (Ø3.3 mm holes), APPROVED SIZE DWG. NO. PvM 2013-11-25 see below. A3 104403 SCALE DIAMETER H12/h12

ANGLES 1

DRAWN

5,3 20,9

Mounting Options

FINIS

MATERIAL

DO NOT SCALE DRAWING

2:1

CAD FILE:

20,9 26,7

0-10 NMV M3

3,3

REV.

-.04

REV. SHEET

104403 LT40-20 SSV M2 00

00 OF

3,3

Piezo LEGS® Linear Twin 40N Technical Specification Type

10A/20A

10B/20B

Unit

Note

73 (L−28)

100.8 mm drive rod, no mechanical adapter

0-16

mm/s

recommended, no load

4.5

µm

one wfm-step

µm

one microstep

stainless steel

Maximum Stroke Speed Range Step Length

0.0005

vacuum

0.0005

Resolution

driver dependent

Recommended Operating Range

0-20

for best microstepping performance and life time

Stall Force

Holding Force

10-7

torr

mW/Hz

=2 W at 100 Hz wfm-step frequency

JST BM05BSRSS-TB

soldered cable w. 2 x JST 05SR-3S

32.1 x 25.1 x 14

see drawing for details

Stainless Steel

Stainless Steel approximate

Vacuum Maximum Voltage Power Consumption Connector Mechanical Size Material in Motor Housing

Weight Operating Temp.

gram

−20 to +70

ºC Note: All specifications are subject to change without notice.

a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC. b. Typical values for waveform Delta, 20 N load, temperature 20ºC. c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. d. At temperature 20ºC, intermittent runs.

Item no.

Motor Performance

LT4010A-050D1A00

Family name LEGS Linear Twin Stall force 40 = 40 N

Motor type A = SS / Stainless Steel B = SSV / Stainless Steel Vacuum Drive rod (standard lengths) 040 = 40 mm 060 = 60 mm 050 = 50 mm 101 = 100.8 mm Mechanical adapter A0 = No adapter D1 = One adapter - Front D2 = One adapter - Back E1 = Two adapters - Front and back Connector/Cable Motor type A A00 = JST connector, no cable K05 = 0.5 m cable for driver PMD101 and PMCM31 K15 = 1.5 m cable for driver PMD101 and PMCM31 L05 = 0.5 m cable-kit for driver PMD206 and PMD236 L15 = 1.5 m cable-kit for driver PMD206 and PMD236 Motor type B

WFM-STEP LENGTH [µm]

Version 10 = mounts with M3 screws 20 = mounts with M2 screws

Rhomb Delta

6 5 4 3

2 1 0

EXTERNAL FORCE [N]

B10 = 1.0 m Teflon flying wires PTFE AWG28 For connection to driver PMD101 or PMCM31 you need an additional cable-kit, p/n CK6281. For connection to driver PMD206 or PMD236 you need a D-sub adapter, p/n CK6280.

Note: All combinations are not possible!

Please visit our website for the latest updates and to download CAD files

Piezo LEGS速 Linear Twin-C 20N

Piezo LEGSÂŽ Linear Twin-C 20N

Direct drive â&#x20AC;&#x201C; backlash free Nanometer resolution Optical mount interface Quick response and high speed dynamics

LTC20 enclosed linear motor is intended for use in a large range of applications; laser and optics applications, moving mirror mounts, replacement for micrometer screws etc. Very high speed dynamics and nanometer resolution makes it ideal for numerous applications. Piezo LEGS technology is characterized by its outstanding precision. Fast speed and quick response time, as well as long service life are other benefits. In combination with the nanometer resolution the technology is quite unique.

When in hold position it does not consume any power. Drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash. LTC20 linear motor is available in two different mounting versions.

The motor is ideally suited for move and hold applications or for automatic adjustments. Ordering information Motors LTC2013-013

Clamp mount, shaft w. M2.5

LTC2014-013

Nut mount, shaft w. M2.5

Drivers and Controllers PMCM21

Handheld push button driver

PMCM31

Analogue driver

PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

Main Dimensions LTC2013-013

4,5

Pin 1

2â&#x20AC;&#x201C;15

9,5

M2.5x0.45

51,2

Main Dimensions LTC2014-013

4,5

Pin 1

Part No

Name

101748

REV.

LT20C-13 M2.5 Clamp mount

02.00

3/8"-40 UNS

9,5

M2.5x0.45

6,4 21

51,2

Note: Refer to drawings for details. Drive shaft has only limited bending moment capability, and absolutely no rotational torque is allowed. In order to safely mount an endpiece in the threaded hole, you must first release the motor completely (it must not be fixed in position). Thereafter, hold on only to the flat part of the shaft and fasten endpiece tightly. Part No

101749

Name

LT20C-14 M2.5 Thread mount

REV.

02.00

15,8

2â&#x20AC;&#x201C;15

Piezo LEGS® Linear Twin-C 20N Technical Specification clamp mount

Stroke

Step Length

12.8

Pin 1

Speed Range

2.5

0.0003

Resolution

mm mm/s

2.5

µm

one wfm-step

µm

one microstep

5 driver dependent

for best microstepping performance and life time

0-10

M2.5x0.45

Stall Force

12.8

0-10 20

Note

0-10 0.0003

Recommended Operating Range

Unit

nut mount

Pin 1

0-10

LTC2014-013

M2.5x0.45 20

recommended, no load c

4,5

LTC2013-013

4,5

Type

Maximum Voltage

mW/Hz

=1 W at 100 Hz wfm-step frequency

USB mini-B

USB mini-B mm

see drawing for details

Connector Mechanical Size

51.2 x 27 x 21

Material in Motor Housing

Stainless Steel, Aluminum

Stainless Steel, Aluminum 21

Weight Operating Temp. Mounting

Part No

9,5

Power Consumption

3/8"-40 UNS

9,5

Holding Force

6,4

51,2

0 to +50

Clamp

Nut

gram

2–15

approximate

2–15

ºC

Name

REV.

Note: All specifications are subject to change without notice.

a. Max value Part Nois typical for waveform Name Rhomb at 2 kHz, no load, temperature 20ºC. REV. 101748 LT20C-13 M2.5 Clamp mount b. Typical101749 values for waveform Delta, 10 NM2.5 load, Thread temperature 20ºC. LT20C-14 mount 02.00 c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. d. At temperature 20ºC, intermittent runs.

Connector Type

51,2 15,8

02.00

Motor Performance 6

Motor connector is USB mini-B. Motor cable is included (2 m with USB mini-B to JST 05SR-3S). Cable connects directly to driver PMD101 and PMCM31. For connection to driver PMD206 and PMD236 you also need a D-sub adapter (p/n CK6280).

4,5

WFM-STEP LENGTH [µm]

Pin 1

Rhomb Delta

Cable Color

Ground (GND)

Black or brown

Phase 4

Grey

Phase 3

White

Phase 2

Green

Phase 1

Yellow 21

Terminal

EXTERNAL FORCE [N] 5

M2.5x0.45

9,5

Pin Assignment

2–15

Please visit our website for the latest updates and to download CAD files

Piezo LEGS速 Linear Twin-C 40N

Piezo LEGSÂŽ Linear Twin-C 40N

Direct drive â&#x20AC;&#x201C; backlash free Nanometer resolution Optical mount interface Quick response and high speed dynamics

LTC40 linear motor is intended for use in a large range of applications; laser and optics applications, moving mirror mounts, replacement for micrometer screws, etc.

Very high speed dynamics and nanometer resolution makes it ideal for numerous applications. Piezo LEGS technology is characterized by its outstanding precision. Fast speed and quick response time, as well as long service life are other benefits. In combination with the nanometer resolution the technology is quite unique.

The motor is ideally suited for move and hold applications or for automatic adjustments. When in hold position it does not consume any power. Drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash. LTC40 linear motor is available with a few different mounting options - clamp, nut, or flange.

Ordering information Motors LTC4012-013

Clamp mount, shaft with ball tip

LTC4013-013

Clamp mount, shaft with M2.5

LTC4014-013

Nut mount, shaft with M2.5

LTC4016-013

Flange mount, shaft with M2.5

Drivers and Controllers PMCM21

Handheld push button driver

PMCM31

Analogue driver

PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

Main Dimensions LTC4013-013

4,5

Pin 1

5 0,5-14

Pin 1

63,2

0,5-14

Main Dimensions

LTC4012-013

Main Dimensions

LTC4014-013

LTC4016-013 2,7

SØ0,397 [0.16"]

M2.5x0.45

M2.5 x0,45

AISI 420C Hardened

9,5

SØ0,397 [0.16"]

AISI 420C Hardened

REV.

4,5

00.02

4,5

ardened

16"]

63,2 27 32

SØ0,397 [0.16"]

15,8

AISI 420C Hardened

9,5

M2.5x0.45

dened

2,7

35 40

Name

3/8"-40 UNS LT40C-13 M2.5 Clamp mount

Part No

100350

Pin 1

[0.16"]

6,4

2-15

100355 15,8

27 Note: 32

0,5 - 14

63,2

REV.

LT40C-16 M2.5 flange mount 00.02

15,8

Name

REV.

00.02

0,5 - 14

LT40C-14 M2.5 tip 7

Refer to drawings for details. Drive shaft has only limited bending moment capability, and absolutely no rotational torque is allowed. In order to safely mount an endpiece in the threaded hole, you must first release the motor completely (it must not be fixed in position). Thereafter, hold on only to the flat part of the shaft and fasten endpiece tightly.

Name

9,5

5 5

2-15

Part No

63,2

9,5

9,5 32

3/8"-40 UNS

9,5

35 40

9,5

AISI 420C Hardened

SØ0,397 [0.16"]

652

9,5

M2.5x0.45

0,5 - 14

Part No

103652

8 7

Name0,5

- 14

REV.

LT40C-16 M2.5 flange mount 00.02

Piezo LEGS® Linear Twin-C 40N Pin 1

Technical Specification

Pin 1

Unit

Minimum Stroke

12.8

Speed Range

0-16

mm/s

recommended, no load

4.5

µm

one wfm-step

SØ0,397 [0.16"]

AISI 420C Hardened

µm

one microstep

driver dependent

0-20

for best microstepping M2.5 x0,45 M2.5x0.45 performance and life time

Stall Force

Holding Force

Maximum Voltage

Power Consumption

Connector

2,7

M2.5x0.45

Recommended Operating Range

V mW/Hz

=2 W at 100 Hz wfm-step frequency

see drawing for details

0.0005

Resolution

9,5

Step Length

Note

Pin 1

LTC40

35 40

Type

USB mini-B

Mechanical Size

63.2 x 32 x 28

Material in Motor Housing

28 Stainless Steel, Aluminum

Weight Operating Temp.

165

gram

0 to +50

ºC

LTC4012-013

Versions

63,2

28 approximate

LTC4013-013

LTC4014-013

2-15

Part No Name

Name

Note: All specifications without notice. REV. Name 103652 are subject to change LT40C-16 M2.5 flange REV.

Clamp m. 100355 00.02LT40C-14 M2.5 tip LT40C-13 M2.5 Clamp mount

Connector Type

63,2

LTC4016-013

Part No

a. Max value is typical for waveform Rhomb 20ºC. Part No at 2 kHz, no load, temperature Name Part No b. Typical value for waveform Delta, 20 N load, temperature 20ºC. 100100 LT40C-12 round tip c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. 100350 d. At temperature 20ºC, intermittent runs.

63,2

27 32

00.02

mount 00.0

Motor Performance 9

7 6 5 4

4,5

WFM-STEP LENGTH [µm]

Pin 1

Rhomb Delta

2 1

Terminal

Cable Color

Ground (GND)

Black or brown

Phase 4

Grey

Phase 3

White

Phase 2

Green

Phase 1

Yellow 21

EXTERNAL FORCE [N] 5

M2.5x0.45

9,5

Pin Assignment

2–15

Please visit our website for the latest updates and to download CAD file

Piezo LEGS速 Linear Twin-C 300N

Piezo LEGS® Linear Twin-C 300N

Direct drive – backlash free Nanometer resolution No power draw in hold position Quick response Heavy loads

LTC300 linear motor is intended for high force and precision applications. This includes applications in vacuum for the semiconductor industry.

The advantage of using the Piezo LEGS technology is the very precise positioning resolution, as well as automatic locking giving true set‑and-forget performance. The technology is based on direct drive without any backlash.

Piezo LEGS technology is characterized by its outstanding precision. Quick response time, as well as long service life are other benefits. In combination with the nanometer or even subnanometer resolution the technology is quite unique.

Ordering information Motor LTC30011-020

Standard

Drivers and Controllers PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

Main Dimensions LTC30011-020 Standard version

110 (max stroke) 80 2

50 40

M5x0.8

(4x)

20mm stroke

Electrical Connector Type

17,5

Motor has multiple options for connectors depending on customer requirements. Options include LEMO connector, JST connector, or conventional D-sub type connector.

Phase 1 Yellow Phase 2 Green Phase 3 White Phase 4 Grey GND Black

Unless otherwise stated, motor is supplied with 2x JST 05SR-3S Connector

Cable Assignment Terminal

Cable Color

Phase 1

Yellow

Phase 2

Green

Phase 3

White

Phase 4

Grey

Ground (GND)

Black or brown

REV.

-.04

REV.

300 N wide 38

03.03

4,3

Piezo LEGS® Linear Twin-C 300N Technical Specification Type

LTC30011-020 standard version

Maximum Stroke Speed Range Step Length

Recommended Operating Range Stall Force Holding Force Maximum Voltage Power Consumption

Connector Mechanical Size Material in Motor Housing Weight Operating Temperature

Note

0-0.3

mm/s

µm

one wfm-step

µm

one microstep

driver dependent

0-150

for best microstepping performance and life time

300

> 300

0.0004

Resolution

Unit

recommended, no load c

0.2

W/Hz

= 10 W at 50 Hz wfm-step frequency

see drawing for details

955

gram

approximate

+10 to +70

ºC

On request 80 x 50 x 50 Stainless Steel

Note: All specifications are subject to change without notice.

a. Max value is typical for waveform Rhomb at 50 Hz, no load, temperature 20ºC. b. Typical value for waveform Delta, 150 N load, temperature 20ºC. c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. d. At temperature 20ºC, intermittent runs.

Motor Performance 7

Rhomb Delta

WFM-STEP LENGTH [µm]

100

150

200

250

300

EXTERNAL FORCE [N]

Please visit our website for the latest updates and to download CAD files

Piezo LEGS速 Linear Twin-C 450N

Piezo LEGSÂŽ Linear Twin-C 450N

Direct drive â&#x20AC;&#x201C; backlash free Nanometer resolution No power draw in hold position Quick response Heavy loads

LTC450 linear motor is intended for high force and precision applications. This includes applications in vacuum for the semiconductor industry.

The advantage of using the Piezo LEGS technology is the very precise positioning resolution, as well as automatic locking giving true set-and-forget performance. The technology is based on direct drive without any backlash.

Ordering information Motor LTC45011-020

Standard

Drivers and Controllers PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

Main Dimensions LTC45011-020 Standard version

128 (max stroke)

(4x)

4,3

20mm stroke

3 9

Note: Refer to drawings for details.

Electrical Connector Type

17,5

Motor has multiple options for connectors depending on customer requirements. Options include LEMO connector, JST connector, or conventional D-sub type connector.

Phase 1 Yellow Phase 2 Green Phase 3 White Phase 4 Grey GND Black

Unless otherwise stated, motor is supplied with 2x JST 05SR-3S Connector

Cable Assignment Terminal

Cable Color

Phase 1

Yellow

Phase 2

Green

Phase 3

White

Phase 4

Grey

Ground (GND)

Black or brown

REV.

-.04

42 Part No

Name

REV.

Piezo LEGS® Linear Twin-C 450N Technical Specification Type

LTC45011-020 standard version

Maximum Stroke Speed Range Step Length

Recommended Operating Range Stall Force Holding Force Maximum Voltage Power Consumption

Connector Mechanical Size Material in Motor Housing Weight Operating Temperature

Note

0-0.3

mm/s

µm

one wfm-step

µm

one microstep

driver dependent

0-225

for best microstepping performance and life time

450

> 450

0.0002

Resolution

Unit

recommended, no load c

0.3

W/Hz

= 15 W at 50 Hz wfm-step frequency

see drawing for details

1060

gram

approximate

+10 to +70

ºC

On request 98 x 50 x 50 Stainless Steel

Note: All specifications are subject to change without notice.

a. Max value is typical for waveform Rhomb at 50 Hz, no load, temperature 20ºC. b. Typical value for waveform Delta, 225 N load, temperature 20ºC. c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. d. At temperature 20ºC, intermittent runs.

Motor Performance 7

Rhomb Delta

WFM-STEP LENGTH [µm]

100

150

200

250

300

350

400

450

EXTERNAL FORCE [N]

Please visit our website for the latest updates and to download CAD files

Piezo LEGS速 Linear Spring 15N

Piezo LEGSÂŽ Linear Spring 15N

Motor for linear stage mount Direct drive â&#x20AC;&#x201C; backlash free Nanometer resolution No power draw in hold position Quick response and high speed dynamics

LS15 linear motor is intended for a large range of OEM applications. Design focus has been for ease of integration. The very high speed dynamics and nanometer resolution makes it ideal for numerous applications. Piezo LEGS technology is characterized by its outstanding precision. Fast speed and quick response time, as well as long service life are other benefits. In combination with the nanometer resolution the technology is quite unique.

a linear stage unit. When motor is in hold position it does not consume any power. Drive technology is direct, meaning no gears or lead screws are needed to create linear motion. This means the motor has no mechanical play or backlash. Piezo LEGS 15N linear motor is vacuum compatible.

The motor is ideally suited for move and hold applications or for automatic adjustments of

Ordering information Motors LS1510B-

Stainless steel

Drive rods 100361-40

Drive rod 40 mm

100361-50

Drive rod 50 mm

100361-60

Drive rod 60 mm

100361-101

Drive rod 100.8 mm

100361-150

Drive rod 150 mm

Drivers and Controllers PMCM21

Handheld push button driver

PMCM31

Analogue driver

PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

Linear Encoders See page 87

9 22

10,8

23,3 Main Dimensions LS15

Electrical Connector Types Motor has soldered cables with one connector of type JST 05SR-3S. 4

17,5

2x M3

1 Phase 1 Yellow Phase 2 Green Phase 3 White Phase 4 Grey GND Black

3,3 L

Unless otherwise stated, motor is supplied with 2x JST 05SR-3S Connector

Pin Assignment

17,6 2

23,3

Cables out this direction

3,4 Name 2x 3.3 THRU ALL 6 4x M4 - 6H

Part No

102070

22 35 42

LT20-10 SSV M3

Note: Refer to drawings for details.

REV.

unt SSV

REV.

-.04

Terminal

Cable Color

Phase 1

Yellow

Phase 2

Green

Phase 3

White

Phase 4

Grey

Ground (GND)

Black or brown

Piezo LEGS® Linear Spring 15N Technical Specification Type

Unit

Note

0-16

mm/s

recommended, no load

4.5

µm

one wfm-step

µm

one microstep

vacuum

Speed Range Step Length

LS1510B a

0.0005

Resolution

driver dependent

Recommended Operating Range

0-8

for best microstepping performance and life time

Stall Force Holding Force

> 15

Vacuum

10-7

torr

Maximum Voltage Power Consumption

mW/Hz

=0.7 W at 100 Hz wfm-step frequency

see drawing for details

gram

approximate, without cables

−20 to +70

ºC

soldered Teflon wires w. JST 05SR-3S

Connector Mechanical Size

42 x 23.3 x 15

Material in Motor Housing

Stainless Steel

Weight Operating Temp.

a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC. b. Typical values for waveform Delta, 7.5 N load, temperature 20ºC. c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. d. At temperature 20ºC, intermittent runs.

Item no.

Note: All specifications are subject to change without notice.

Motor Performance

LS1510B-B10

Family name LEGS Linear Spring Stall force 15 = 15 N

Motor type B = SSV / Stainless Steel Vacuum Connector/Cable B15 = 1.5 m Teflon flying wires PTFE AWG28* * = Connects directly to driver PMD101 and PMCM31 For connection to driver PMD206 or PMD236 you need a D-sub adapter, p/n CK6280. Note: Drive rod has to be ordered separately.

WFM-STEP LENGTH [µm]

Version 10

Rhomb Delta

6 5 4 3

2 1 0

EXTERNAL FORCE [N]

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Piezo LEGS速 Caliper 20N

Piezo LEGSÂŽ Caliper 20N

For stage integration Direct drive â&#x20AC;&#x201C; backlash free Nanometer resolution Simple drive electronics Quick response and high speed dynamics

LC20 linear motor is intended for motorizing linear stages or goniometer stages. It is miniaturized to such a degree it will fit within the stage block.

Manufacturers can with the Caliper motor reach new degrees of miniaturization in stage motorization. The very high speed dynamics and nanometer resolution makes it ideal for motorized stages. Piezo LEGS technology is characterized by its outstanding precision. Fast speed and quick response time, as well as long service life are other benefits. In combination with the nanometer resolution the technology is quite unique.

When the motor is in hold position it does not consume any power. The drive technology is direct, meaning no gears or lead screws are needed to create linear motion. The motor has no mechanical play or backlash.

Ordering information Motors LC2010

Motor for goniometer stage

LC2020

Motor for linear stage

Drivers and Controllers PMCM21

Handheld push button driver

PMCM31

Analogue driver

PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

Linear Encoders See page 87

9 22

10,8

Main Dimensions LC20

Electrical Connector Types

23,3

17,5

Motor has two fitted cables with JST 05SR-3S connectors on the end. The cables must be connected in parallell to the driver.

15,7

20,7

1 Phase 1 Yellow 17

Phase 2 Green Phase 3 White Phase 4 Grey GND Black

3,3 L

Unless otherwise stated, motor is supplied with 2x JST 05SR-3S Connector

Pin Assignment 60 44

20,4

Part No

Name

Terminal

Cable Color

Phase 1

Yellow

Phase 2

Green

Phase 3

White

Phase 4

Grey

Ground (GND)

Black or brown

REV.

Note: All specifications are subject to change without notice. Detailed drawings 102070 LT20-10 SSV M3 can be found in the document Installation Guidelines for the Piezo LEGS Caliper on our website.

-.04

Installation

Our PiezoMotor staff will be happy to assist you with details on system integration and can provide mechanical engineering expertise. On our webpage you can find CAD files for download (motor units and mock-up stages).

20,7

(2x)

-0,002 3 g7 -0,012

15,7 ±0,03

Piezo LEGS Caliper is designed for stage integration. It is miniaturized to a degree where it will fit inside a linear stage or a goniometer stage. The motor is easily mounted in the stage blocks using eight screws. No further adjustments have to be made. Please look at the document Installation Guidelines for the 44 Piezo LEGS Caliper for information on how to design the stage blocks and how to 40the ±0,1 correctly mount motor. Guideline document also has more detailed drawings 0,03 A 8 of the motor.

0,01

60 ±0,1

14,4

5.2 4 10 ±0,02

1.6 (4x) M2 - 6H

27 ±0,1

(4 x) 54

Name

Caliper Linear 50

2.4 THRU ALL 4.4 2.4

REV.

-.03

Piezo LEGS® Caliper 20N Technical Specification LC2010

for gonio stage

Stroke

±10º

Minimum Radius

86 mm

Speed Range

Step Angle/Length

Note

29 mm

see installation guidelines

0-7 º/s

0-10 mm/s

recommended, no load

30 µrad

2.5 µm

0.004 µrad

Resolution

LC2020

for linear stage

0.0003 µm

one wfm-step one microstep d

< 1 nm

driver dependent

0-10 N

for best microstepping performance and life time

Stall Force

20 N

Holding Force

22 N

Maximum Voltage

48 V

10 mW/Hz

2 x soldered cable with JST 05SR-3S

60 x 20.7 x 20.4 mm

Stainless Steel, Aluminum

< 10 nrad

Recommended Operating Range

Power Consumption Connector Mechanical Size Material in Motor Housing

Weight Operating Temp.

110 grams

0 to +50 ºC

LC20

Motor Performance

A-044

Family name LEGS Caliper

Rhomb Delta

Stall force 20 = 20 N

Motor type A = SS / Stainless Steel Drive rod (standard lengths) 044 = 44 mm (will give stroke according to specifications)

WFM-STEP LENGTH [µm]

Version 10 = for goniometer stage mount 20 = for linear stage mount

see drawing for details

Note: All specifications are subject to change without notice.

a. Value is valid for minimum radius 86 mm. b. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC. c. Typical values for waveform Delta, 10 N load, temperature 20ºC. d. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. e. At temperature 20ºC, intermittent runs.

Item no.

=1 W at 100 Hz wfm-step frequency

50 4 40 3

Connector/Cable 2 A15 = 1.5 m cables - does not connect directly to either PM driver K15 = 1.5 m cable-kit for driver PMD101 and PMCM31 L15 = 1.5 m cable-kit for driver PMD206 and PMD236

WFM-STEP ANGLE [µrad]

Type

EXTERNAL FORCE [N] Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). Wfm-step length/angle is the average distance the drive rod moves when the legs take one wfm-step (i.e. for one waveform cycle). Note: Standard deviation σ of 0.5 µm should be taken into account. Typical values are given for 20ºC.

Please visit our website for the latest updates and to download CAD files

Piezo LEGS速 Rotary 30 mNm

Piezo LEGS® Rotary 30 mNm

Direct drive – backlash free Integrated Absolute Encoder Microradian resolution No power draw in hold position Quick response

LR17 rotary motor is a high precision second generation of Piezo LEGS Rotary. It is intended for a large range of applications where high speed dynamics and positioning with precision is crucial. High torque output in a small package is also beneficial. Piezo LEGS technology is characterized by its outstanding precision. Fast speed and quick response time, as well as long service life are other benefits. In combination with the micro radian resolution the technology is quite unique. The motor is ideally suited for move and hold applications or for automatic adjustments. When in hold position it does not consume any power. Drive technology is direct, meaning no gears are needed to create motion. The motor has no mechanical play or backlash.

Motor comes with an integrated high resolution magnetic encoder. Feedback from the encoder gives resolution of 0.2 mrad (0.01º) in closed loop operation. Open loop resolution of the motor is 0.1 µrad (0.000006º).

Ordering information Motor LR17

Standard version

Drivers and Controllers PMCM31

Analogue driver

PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

-0,00 3 f7 -0,01

10,3 8

32,2

(3x

Electrical Connector Type

Connector on the motor is a 16 pin dual row CviLux connector CI1116M2VD0, which mates with socket from the CviLux CI1116 family.

10,3 8

32,2

(3x

)12

-0,006 3 f7 -0,016

Main Dimensions LR17

)12

0° (3 x) M2 - 6H

16 15 14 13 12 11 10 9

2.5

Note: Refer to drawings for details.

Pin Assignment Pin

Terminal

Sensor +5V/+3V3

Note

Do not connect

Motor Phase 3

Motor Phase 4

Do not connect

Motor Phase 2

Motor Phase 1

Sensor Data (SDA)

Sensor Clock (SCK)

Sensor Ground (GND)

Motor Ground (GNDM)

Do not connect Do not connect

Encoder LR17 has an integrated magnetic absolute encoder. It gives 15 bit SSI data. SCK (Sensor Clock) and SDA (Sensor Data) are normally at high level (idle). When receiving a clock pulse from the controller, the LR17 will respond with position data. The SCK frequency should be 70-180 kHz. Data should be read shortly before the positive flank. The time-out between positive flanks is 20-30 µs. Part No The output data is 15 bits (msb first), followed by a stop bit. If SCK continues beyond the stop bit, there will be a second stop bit followed by repeated 15 bit Name data and a stop bit. A minimum of 120 µs is needed after position readout to ensure refresh of position data. Reading position every 0.5 ms is the maximum recommended rate for continuous operation.

Name

103068

Rotating Motor Ø17

REV.

Rotating Motor Ø17

-.06

idle = 1

SDA SCK A A: 1st clock pulse, SDA stays idle until positive flank. B: 2nd clock pulse, SDA output is bit1 (msb). C: 16th clock pulse, SDA output is bit15 (lsb).

20 µs ≤ tm ≤ 30 µs

Piezo LEGS® Rotary 30 mNm Technical Specification Type Diameter Angular Range Speed Range Step Angle

Motor Resolution

LR17

Unit

360

continuous

0-170

º/s

recommended, no load

800

µrad

one wfm-step

0.1

µrad

one microstep

µrad

driver dependent

< 0.1

Encoder Type

Note

Magnetic, absolute

SSI

Encoder Accuracy

6.3

mrad

in a non-magnetic environment

Encoder Resolution

0.2

mrad

32768 CPR (15 bit)

0-15

mNm

for best microstepping performance and life time

Recommended Operating Range Stall Torque Holding Torque Shaft Load, Max. Shaft Press Fit Force, Max. Maximum Voltage Power Consumption

mNm

> 30

mNm

1 2

N N

- radial (6.5 mm from mounting face) - axial

3.5

mW/Hz

CviLux CI1116M2VD0

Connector Material in Motor Housing Weight Operating Temperature

=0.35 W at 100 Hz wfm-step frequency Mates with socket CviLux CI1116S

Aluminium, Stainless Steel 30

gram

0 to +50

ºC

approximate

Note: All specifications are subject to change without notice.

a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC. b. Typical value for waveform Delta, 15 mNm torque, temperature 20ºC. c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. d. At temperature 20ºC, intermittent runs.

Item no.

Motor Performance

LR17-030A20E1

1,8

Family name LR = LEGS Rotary Diameter 17 = Ø 17 mm

Motor type A = SS / Stainless Steel Version Encoder E1 = Magnetic 15 bit SSI encoder Connector/Cable A00 = Connector, no cable A15 = 1.5 m cable - does not connect to either PM driver K15 = 1.5 m cable - for driver PMD101 and PMCM31 L15 = 1.5 m cable - for driver PMD206 and PMD236

1,4

WFM-STEP ANGLE [mrad]

Stall torque 030 = 30 mNm

Rhomb Delta

1,6

1,2 1 0,8 0,6

0,4 0,2 0

EXTERNAL TORQUE [mNm]

Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). Wfm-step angle is the average distance the drive disc rotates when the legs take one wfm-step (i.e. for one waveform cycle). Note: Standard deviation σ of 0.1 mrad should be taken into account. Typical values are given for 20ºC.

Please visit our website for the latest updates and to download CAD files

Piezo LEGS速 Rotary 50 mNm non-magnetic

Piezo LEGS® Rotary 50 mNm non-magnetic

Non-magnetic Direct drive – backlash free Microradian resolution No power draw in hold position Quick response

LR50 rotary motor is non-magnetic. It is intended for a large range of applications where there is demand for nonmagnetic material in motor.

Very high speed dynamics and micro radian precision makes it ideal for numerous applications. High torque output in a small package is also beneficial. Piezo LEGS technology is characterized by its outstanding precision. Fast speed and quick response time, as well as long service life are other benefits. In combination with the micro radian resolution the technology is quite unique.

The motor is ideally suited for move and hold applications or for automatic adjustments. When in hold position it does not consume any power. Drive technology is direct, meaning no gears are needed to create motion. It has no mechanical play or backlash. LR50 nonmagnetic motor is available in a standard version, and in a vacuum version.

Ordering information Motor LR5012D-

Non-magnetic vacuum

Drivers and Controllers PMCM21

Handheld push button driver

PMCM31

Analogue driver

PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

9 22

10,8

Electrical Connector Types

Main Dimensions LR5012D 23,3

Non-Magnetic Vacuum

1 Phase 1 Yellow 17

3,3 L

Phase 2 Green Phase 3 White Phase 4 Grey GND Black

(2x) M2

Unless otherwise stated, motor is supplied with 2x JST 05SR-3S Connector

3 f7

34,70 6,50 0,50

17,5

Vacuum type motor has soldered cables with one connector of type JST 05SR-3S.

Pin Assignment

Note: Refer to drawings for details.

Part No

102070

Part No

100444

Name

LT20-10 SSV M3

Terminal

Cable Color

Phase 1

Yellow

Phase 2

Green

Phase 3

White

Phase 4

Grey

Ground (GND)

Black or brown

REV.

-.04

Name

LR50-12 NMV

00.02

REV.

Piezo LEGS® Rotary 50 mNm non-magnetic

Technical Specification Type

LR5012D

Unit

Note

360

continuous

0-100

º/s

recommended, no load

550

µrad

one wfm-step

µrad

one microstep

< 0.1

µrad

driver dependent

0-25

mNm

for best microstepping performance and life time

Stall Torque

mNm

Holding Torque

mNm

radial (5 mm from mounting face)

axial

10-7

torr

non-magnetic vacuum

Angular Range Speed Range Step Angle

0.07

Resolution Recommended Operating Range

Shaft Load, Max. Shaft Press Fit Force, Max. Vacuum Maximum Voltage Power Consumption

mW/Hz

=0.7 W at 100 Hz wfm-step frequency

see drawing for details

soldered cable with JST 05SR-3S

Connector Mechanical Size

Ø23 x 34.1

Material in Motor Housing

Non-magnetic

Weight Operating Temperature

gram

−20 to +70

ºC Note: All specifications are subject to change without notice.

a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC. b. Typical value for waveform Delta, 25 mNm torque, temperature 20ºC. c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. d. At temperature 20ºC, intermittent runs.

Item no.

Motor Performance

LR5012D-00B10

Family name LEGS Rotary

Motor type D = NMV / Non-Magnetic Vacuum Encoder 00 = No Encoder (only option) Connector/Cable B10 = 1.0 m Teflon flying wires PTFE AWG28 for connection to driver PMD101 and PMCM31 For connection to driver PMD206 or PMD236 you need a D-sub adapter, p/n CK6280.

Delta

0,8

WFM-STEP ANGLE [mrad]

Version

Rhomb

0,9

Stall torque 50 = 50 mNm

0,7 0,6 0,5 0,4 0,3 0,2 0,1 0

EXTERNAL TORQUE [mNm]

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Piezo LEGS速 Rotary 80 mNm

Piezo LEGSÂŽ Rotary 80 mNm

Direct drive â&#x20AC;&#x201C; backlash free Nanometer resolution No power draw in hold position Quick response

LR80 rotary motor is intended for a large range of applications. Very high speed dynamics and microradian precision makes it ideal for numerous applications.

High torque output in a small package is also beneficial. Piezo LEGS technology is characterized by its outstanding precision. Fast speed and quick response time, as well as long service life are other benefits. In combination with the micro radian resolution the technology is quite unique.

The motor is ideally suited for move and hold applications or for automatic adjustments. When in hold position it does not consume any power. Drive technology is direct, meaning no gears are needed to create motion. It has no mechanical play or backlash. LR80 motor is available in standard version, and vacuum version.

Ordering information Motors LR8012A-

Standard version, stainless steel

LR8012B-

Vacuum version, stainless steel

Drivers and Controllers PMCM21

Handheld push button driver

PMCM31

Analogue driver

PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

10,8

23,3

Main Dimensions LR8012A and LR8012B

Electrical Connector Types

Standard and Vacuum

Standard type motor has one connector of type JST BM05B-SRSS-TB.

10,8

(2x) M2x0.4

23,3

3,3

Vacuum type motor has soldered cables with one connector of type JST 05SR-3S.

17,5

3 f7

17,5

0,50

GND Phase 4 Phase 3 Phase 2 Phase 1

34,1 6,50

1 Phase 1 Yellow

18 3,3

Phase 2 Green Phase 3 White Phase 4 Grey GND Black

Unless otherwise stated, motor is supplied with 2x JST 05SR-3S Connector

Note: Refer to drawings for details.

Pin Assignment

,5 15 6 1,6

1,5

Name

102070

LT20-10 SSV M3

Name

Cable Color

Phase 1

Yellow

Phase 2

Green

Phase 3

White

Phase 4

Grey

Ground (GND)

Black or brown

02.06

Part No

360

Terminal

REV.

LT20-10 SS M3

LR80-12 SS

REV.

-.04

REV.

01.01

Piezo LEGS® Rotary 80 mNm Technical Specification Type

LR8012A (standard)

Angular Range Speed Range Step Angle

LR8012B (vacuum)

Note

360

continuous

0-100

º/s

recommended, no load

450

Unit

0.05

450 0.05

µrad

one wfm-step

µrad

one microstep

Resolution

< 0.1

µrad

driver dependent

Recommended Operating Range

0-40

mNm

for best microstepping performance and life time

Stall Torque

mNm

Holding Torque

mNm

radial (5 mm from mounting face)

axial

Shaft Press Fit Force, Max.

Vacuum

Shaft Load, Max.

Maximum Voltage Power Consumption Connector Mechanical Size Material in Motor Housing

mW/Hz

=0.7 W at 100 Hz wfm-step frequency

JST BM05B-SRSS-TB

soldered cable with JST 05SR-3S

Ø23 x 34.1

see drawing for details

Stainless Steel

Weight Operating Temp.

torr

-7

gram

−20 to +70

ºC Note: All specifications are subject to change without notice.

a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC. b. Typical value for waveform Delta, 40 mNm torque, temperature 20ºC. c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. d. At temperature 20ºC, intermittent runs.

Item no.

Motor Performance

LR8012A-00A15

Family name LEGS Rotary

Motor type A = SS / Stainless Steel B = SSV / Stainless Steel Vacuum Encoder 00 = No Encoder 01 = Magnetic 13 bit encoder Connector/Cable Motor type A A00 = JST connector, no cable A05 = Same as K05 A15 = Same as K15 K05 = 0.5 m cable for driver PMD101 and PMCM31 K15 = 1.5 m cable for driver PMD101 and PMCM31 L05 = 0.5 m cable-kit for driver PMD206 and PMD236 L15 = 1.5 m cable-kit for driver PMD206 and PMD236 Motor type B B10 = 1.0 m Teflon flying wires PTFE AWG28 for connection to driver PMD101 and PMCM31 For connection to driver PMD206 or PMD236 you need a D-sub adapter, p/n CK6280.

Delta

0,8

WFM-STEP ANGLE [mrad]

Version

Rhomb

0,9

Stall torque 80 = 80 mNm

0,7 0,6 0,5 0,4 0,3 0,2 0,1 0

EXTERNAL TORQUE [mNm]

Note: All combinations are not possible!

Please visit our website for the latest updates and to download CAD files

Piezo LEGS速 WavePlate

Piezo LEGS® WavePlate

Unlimited rotation Center thru hole for 0.5” inserts Sub-microradian resolution No power draw in hold position Quick response

Piezo LEGS WavePlate is primarily for use in laser applications with standard 0.5 inch (12.7 mm) inserts. The inserts are locked in place with the provided retaining rings.

For added mounting flexibility, the turnable part has four M1.6 threaded holes. Fine adjustments are made using the innovative Piezo LEGS friction drive technology with sub-microradian resolution. Manual override of the turnable part allows for coarse positioning.

high precision fields. When the rotary part is in hold position the WavePlate does not consume any power. The drive technology is direct, meaning no gears are needed to create motion. There is no mechanical play or backlash in the motion.

WavePlate is ideally suited for move and hold applications within optics or other

Ordering information Motor LW2011A-

WavePlate motor

Drivers and Controllers PMCM21

Handheld push button driver

PMCM31

Analogue driver

PMD101

1-axis microstepping driver

PMD104

4-axis microstepping driver

PMD206

6-axis microstepping driver

PMD236

36-axis microstepping driver

10,8

23,3

Main Dimensions LW20

Electrical Connector Types

Ă&#x2DC;29

2x M3x0,5 24 4x M1.6

14,1

12,8

1,6

,5 15

Name

2,35 (2x retaining Nut) LT20-10 SS M3

REV.

02.06

Note: Refer to drawings for details. Read Installation Guidelines carefully.

Part No

100331

Name

LR Waveplate SS

Pin Assignment

3,3

10,8

GND Phase 4 Phase 3 Phase 2 Phase 1

17,5

Standard type motor has one connector of type JST BM05B-SRSS-TB.

REV.

01.00

Terminal

Cable Color

Phase 1

Yellow

Phase 2

Green

Phase 3

White

Phase 4

Grey

Ground (GND)

Black or brown

Piezo LEGS® WavePlate Technical Specification Type

LW2011A

Unit

Note

360

continuous

Angular Range

Step Angle

0-100

0.55

mrad

Resolution

º/s

one wfm-step

0.01c arc sec

0.004c mº

one microstep

<0.0001 mrad <0.01 arc sec

<0.004 mº

Recommended Operating Range

arc sec

recommended, no load

mº

0.0001c mrad

113

driver dependent for best microstepping performance and life time

0-10

mNm

Stall Torque

mNm

Holding Torque

mNm

Maximum Voltage

3.5

mW/Hz

=0.35 W at 100 Hz wfm-step frequency

see drawing for details

Power Consumption

JST BM05B-SRSS-TB

Connector Mechanical Size

33 x 30 x 24

Material in Motor Housing

Stainless Steel

Weight Operating Temp.

107

gram

−20 to +70

ºC

a. Max value is typical for waveform Rhomb at 2 kHz, no load, temperature 20ºC. b. Typical value for waveform Delta, 10 mNm torque, temperature 20ºC. c. Driver dependent; 8192 microsteps per wfm-step for driver in the PMD200-series. d. At temperature 20ºC, intermittent runs.

Item no.

Note: All specifications are subject to change without notice.

Motor Performance

LW2011A-00A00

Family name LEGS WavePlate

Motor type A = SS / Stainless Steel Encoder 00 = No Encoder (only option) Connector/Cable A00 = JST connector, no cable A05 = Same as K05 A15 = Same as K15 K05 = 0.5 m cable for driver PMD101 and PMCM31 K15 = 1.5 m cable for driver PMD101 and PMCM31 L05 = 0.5 m cable-kit for driver PMD206 and PMD236 L15 = 1.5 m cable-kit for driver PMD206 and PMD236

200

0,8

WFM-STEP ANGLE [mrad]

Version

Rhomb Delta

0,9

Stall torque 20 = 20 mNm

150

0,7 0,6 0,5

100

0,4 0,3 50

0,2

WFM-STEP ANGLE [arc sec]

Speed Range

0,1 0

[mNm] EXTERNAL TORQUE [N] Motor performance with waveform Rhomb (filled) and waveform Delta (dotted). Wfm-step angle is the average distance the drive disc rotates when the legs take one wfm-step (i.e. for one waveform cycle). Note: Standard deviation σ of 0.1 mrad should be taken into account. Typical values are given for 20ºC.

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PiezoMotor速 Driver PMCM21

PiezoMotorÂŽ Driver PMCM21

Easy to use Analog control Low power consumption Small size

PMCM21 is a simple hand-held push-button driver for Piezo LEGS motors (linear and rotary) that offers sub-micron resolution linear motion. Pushing the button to move in one direction ramps up speed by utilizing phase-shifting of the drive signal. Maximum speed, determined by the size of the motor (capacitive load) is generally in the few millimeters per second range. A quick press of the button generates sub-micron steps. Positioning below 0.1 Âľm is possible by altering direction.

Ordering information Driver PMCM21-02

1-axis analogue driver for Piezo LEGS motors

PiezoMotor速 Driver PMCM31

PiezoMotorÂŽ Driver PMCM31

Nanometer resolution Analog control Low power consumption Small size

PMCM31 is a 1-axis analog driver for use with PiezoÂ LEGS motors from PiezoMotor. This driver enables single digit nanometer positioning in combination with mm/s speeds. Maximum speed, determined by the size of the motor (capacitive load) is generally in the few millimeters per second range.

Ordering information Driver PMCM31-02

1-axis analogue driver for Piezo LEGS motors

17,2

62 71

Main Dimensions PMCM31

64 73,6

Functional principle The driver controls the Piezo LEGS motor by feeding waveform signals which elongates and bends each of the piezo drive legs. The waveforms are specially designed to make the motor drive legs perform a precise walking motion. The motion of the drive legs is transferred via friction contact to a linear rod or to a rotary disc. For each waveform cycle the Piezo LEGS motor will take steps, by definition called waveformsteps (wfmâ&#x20AC;&#x2018;steps). The wfmâ&#x20AC;&#x2018;step length is load dependant and also depends on the signal phase shift. With maximum phaseshift (90Ë&#x161;) the step size is in the range of a few

4,5

micrometers for a linear Piezo LEGS motor. Rotary Piezo LEGS motors have their drive legs working on the perimeter of a drive disc. The wfm-step angle depends on the diameter of the rotary motor but is usually less than one milliradian. The maximum step length (and hence the speed) is reduced by internal phase shifting of the waveform signal, and fine positioning is performed through analog bending of the drive legs. The user of the PMCM31 driver will only need to change the control signal voltage level in order to go from full step size down to high precision positioning.

PiezoMotor® Driver PMCM31 Technical Specification Type Number of Axis Electrical Phases per Axis Control Signal Range Waveform Voltage Waveform Power Supply Current Open Loop Operation Temperature range Storage temperature Motor Connector Port Connector Power Supply Voltage Dimensions Weight Part Number

PMCM31-01

Note

1 4 ± 9.6 V 47 ±3 V Trapetzodal 0.3 A <0.02 A

at maximum speed at standby

Yes +10 to +50 °C –25 to +85 °C JST BM05B-SRSS-TB 8-pol socket

Phoenix type

12 ±0.5 V DC

stabilized

73.6 x 71 x 17.2 mm 70 gram PMCM31-01

PMCM31 revision 01 Note: All specifications are subject to change without notice.

PiezoMotor速 Microstep Driver PMD101

Nanometer resolution Closed loop regulation Open loop mode General I/O

PMD101 is a 1-axis driver for use with Piezo LEGS motors from PiezoMotor. It is one of the more advanced drivers in the product range giving the Piezo LEGS motors resolution down in the nanometer/microradian range. Driving the motors in closed loop is possible when reading back position from an positional sensor. PMD101 supports quadrature encoders, and serial SSi sensors. Issuing a single command will guide the motor to the exact encoder count, taking in to account the parameter settings for ramping behavior.

Ordering information Driver PMD101

1-axis microstep driver for Piezo LEGS motors

Main Dimensions PMD101

106

Functional principle Driver controls the Piezo LEGS motor by feeding waveform signals which elongates and bends each of the piezo drive legs. Waveforms are specially designed to make the drive legs perform a precise walking motion. Motion of the drive legs is transferred via friction contact to a linear rod or to a rotary disc. For each waveform cycle the Piezo LEGS motor will take one full step, by definition called a waveform-step (wfm‑step). The wfm‑step length is load dependant but in the range of a few micrometers for a linear Piezo LEGS motor. Rotary Piezo LEGS motors have their drive legs working on the perimeter of a drive disc. The wfm-step angle depends on the diameter of the rotary motor but is usually less than one milliradian. Generated signal waveform is made up of a large number of voltage target points in time. Each small voltage change will move the motor only by a fraction of a wfm-step, defined as a

microstep. PMD101 driver gives a maximum resolution of 2048 microsteps per full wfmstep. One microstep with highest resolution settings equals ~2 nanometer (0.002 µm) of linear motion, or ~0.5 microradian of angular motion.

Working with the driver PMD101 communicates with the host (PC) via USB. Communication with the driver is through a protocol language (ASCII commands). User can run in closed loop target mode, or in open loop mode, with full access to set resolution, step frequency (speed) etc. Positional sensors are used to keep track of the precise position of the Piezo LEGS motors. The driver can read limit switches and reset at index. Ramping parameters are set to prevent overshooting when closing in on target in closed loop operation. The PMD101 is a full featured driver for demanding applications.

PiezoMotor® Microstep Driver PMD101 Technical Specification Type Number of Axis Electrical Phases per Axis Signal Voltage Range Max Resolution

PMD101 4 0-45 V 2048 µsteps / wfm-step

Open Loop Operation

Yes

Closed Loop Operation

Yes

Number of Sensor Axis Supported Sensors

Quadrature Counting Frequency General I/O I/O Port Features Host Communication Host Connector

3 in 2 out

SSi

only 1 input pin available when using 2 limit switches

Step direction interface, Analog run RS232 (via USB)

hardware implemented USB-to-RS232, commands are sent in plain ASCII format

USB

Sensor Connector

JST BM06B-SRSS-TB

Dimensions

with index (ABZ)

5 MHz

JST BM05B-SRSS-TB

Power Supply

example LT20 motor at no load: one wfm-step ≈ 5 µm one µstep ≈ 2.4 nm

1 Quadrature Analogue Serial

Motor Connector I/O Port Connector

Note

2 x 8 pin header

for 16 pole IDC plug

12-24 V DC

15 V (1200 mA) AC-DC adaptor included

106 x 66 x 36 mm Note: All specifications are subject to change without notice.

PiezoMotor速 Microstep Driver PMD104

Nanometer resolution Closed loop regulation Open loop mode Anybus module

PMD104 is a 4-axis driver for Piezo LEGS motors. It is one of the more advanced drivers in the product range giving the Piezo LEGS motors resolution down in the nanometer/ microradian range. Driving the motors in closed loop is possible when reading back position from an positional sensor. PMD104 supports quadrature sensors and a few different serial sensors. Issuing a single command will guide the motor to the exact encoder count, taking in to account the parameter settings for ramping behavior.

Ordering information Driver PMD104

4-axis Microstep driver for LEGS motors

Piezo

267

Main Dimensions PMD104

251

move the motor only by a fraction of a wfm-step, defined as a microstep. PMD104 driver gives a maximum resolution of 2048 microsteps per full wfm-step. One microstep with highest resolution settings equals ~2 nanometer (0.002 µm) of linear motion, or ~0.5 microradian of angular motion.

Working with the driver PMD104 communicates with the host (PC) via RS232 or TCP/IP. Communication with the driver is through a protocol language. The user can run in closed loop target mode, or in open loop mode, with full access to set resolution, step frequency (speed) etc. Positional sensors are used to keep track of the precise position of the Piezo LEGS motors. The driver can read limit switches and reset at index. Ramping parameters are set to prevent overshooting when closing in on target in closed loop operation. The PMD104 is a full featured driver for demanding applications.

PiezoMotor® Microstep Driver PMD104 Technical Specification Type Number of Axis Electrical Phases per Axis Signal Voltage Range Max Resolution

PMD104 4 0-45 V 2048 µsteps / wfm-step

Open Loop Operation

Yes

Closed Loop Operation

Yes

Number of Sensor Axis Supported Sensors Sensor Counting Frequency

example linear LT20 motor at no load: one wfm-step = 5 µm one µstep = 2.4 nm

4 Quadrature Serial

with index (ABZ)

35 MHz

Firmware Bootloader

Yes

Host Communication

RS232 and TCP/IP

Host Connector

Note

1 x D-sub DE9 1 x RJ45

RS232 TCP/IP (via Anybus interface)

Motor Connector

1 x D-sub DB25F

motor 1-4

Sensor Connector

2 x DA15F 1 x DC37F

sensor 1, sensor 2 sensor 3-4

24 V DC

24 V (4 A) AC-DC adaptor included

Power Supply Dimensions

267 x 251 x 87 mm Note: All specifications are subject to change without notice.

PiezoMotor速 Microstep Driver PMD206

PiezoMotor® Microstep Driver PMD206

Nanometer resolution Closed loop regulation Open loop mode General I/O

PMD206 is a 6-axis driver for use with Piezo LEGS motors from PiezoMotor. The 200-series drivers are the most advanced in the product range, giving Piezo LEGS resolution down in the sub‑nanometer/sub‑microradian range. Driving the motors in closed loop is possible when reading back position from positional sensors. PMD206 supports quadrature encoders and serial SSi sensors. Issuing a single command will guide the motor to the exact encoder count, taking into account the parameter settings for ramping behavior.

Ordering information Driver PMD206

6-axis microstep driver for Piezo LEGS motors

327

82,1

Main Dimensions PMD206

298

Functional principle Driver controls the Piezo LEGS motor by feeding waveform signals which elongates and bends each of the piezo drive legs. Waveforms are specially designed to make the drive legs perform a precise walking motion. Motion of the drive legs is transferred via friction contact to a linear rod or to a rotary disc. For each waveform cycle the Piezo LEGS motor will take one full step, by definition called a waveform-step (wfm‑step). The wfm‑step length is load dependant but in the range of a few micrometers for a linear Piezo LEGS motor. Rotary Piezo LEGS motors have their drive legs working on the perimeter of a drive disc. The wfm‑step angle depends on the diameter of the rotary motor but is usually less than one milliradian. Generated signal waveform is made up of a large number of voltage target points in time. Each small voltage change will move the motor

298

only by a fraction of a wfm-step, defined as a microstep. PMD206 driver gives a maximum resolution of 8192 microsteps per full wfmstep. One microstep with highest resolution settings equals ~0.6 nanometer (0.0006 µm) of linear motion, or ~0.1 microradian of angular motion.

Working with the driver PMD206 communicates with the host (PC) via TCP/IP or by serial 4-wire RS485. Communication with the driver is through a protocol language (ASCII commands). User can run in closed loop target mode, or in open loop mode, with full access to set resolution, step frequency (speed) etc. Positional sensors are used to keep track of the precise position of the Piezo LEGS motors. Driver can read limit switches and reset at index. Ramping parameters are set to prevent overshooting when closing in on target in closed loop operation. PMD206 is a full featured driver for demanding applications.

PiezoMotor® Microstep Driver PMD206 Technical Specification Type Number of Axis Electrical Phases per Axis Signal Voltage Range Max Resolution

PMD206 4 0-45 V 8192 µsteps / wfm-step

Open Loop Operation

Yes

Closed Loop Operation

Yes

Number of Sensor Axis Supported Sensors Quadrature Counting Frequency General I/O Host Communication

Note

6 Quadrature Serial

3 out, 4 in

on each sensor axis

RS485 TCP/IP

commands are sent in plain ASCII format

1 x D-sub 9M 1 x RJ45

(COM1) (TCP/IP)

Motor Connector

6 x D-sub 9F

(M1-M6)

Sensor and I/O Connector

6 x D-sub HD 15F (S1-S6)

External Sensor

1 x D-sub 9M 1 x RJ45

Dimensions

with index (ABZ) SSi

20 MHz

Host Connector

Power Supply

example LT20 linear motor at no load: one wfm-step ≈ 5 µm one µstep ≈ 0.6 nm

(COM2) (TCP/IP)

110-230 V AC, 50/60 Hz 328 x 298 x 83 mm Note: All specifications are subject to change without notice.

Linear Encoders

Non-contact optical encoders Quadrature interface – A/B and index Compatible with all PiezoMotor microstepping drivers

Piezo LEGS linear motors are capable of extreme resolution, down to the sub-nanometer range. Position encoders are required to build a system with high repeatability and accuracy. PiezoMotor offers linear encoders from Renishaw® and from MicroE Systems®. Both companies are supplying very high quality, top of the line encoders. Encoders of two different resolutions from each company are kept in stock at PiezoMotor. They are offered as an add-on to the motor purchase, complete with cables, instructions, drawings and CAD files, giving the customer an easy integration. Common features to all encoders:

Selection

Installation Guideline

With high resolution motors it is important to exercise great care in selecting the appropriate encoder, and even more important – the correct encoder location. The rule of thumb is to place the encoder as close as possible to the point of interest. This will minimize issues like thermal drift in the mechanical structure. Experts at PiezoMotor are available regarding design and selection questions.

System design

In a closed loop system, the motor, encoder and driver act together to move an object to a given target position. Accuracy of the position is given by the accuracy of the sensor. With the high resolution motor, Piezo LEGS, it is possible to regulate to a position within ±1 sensor count. The total system accuracy is depending on where the sensor is mounted, how it is mounted and of course the mechanical stability and thermal behavior of the complete assembly.

To make a complete closed loop motion system a number of key components are required:

Mechanical Installation

Piezo LEGS linear motor Piezo LEGS microstep driver Linear guide (roller bearing) Encoder Scale, with/without index mark Cabling

Links to the manufacturer manuals can be found at www.piezomotor.com. The documentation provides information about the correct mounting of the encoder and encoder scale. The mechanical design and the location of the sensor is very important. For example, 10 mm of steel (with thermal expansion coefficient of 12·10-6 ºC-1) located between the sensor position and the position of interest will introduce an error due to thermal drift of 1.2 µm for a 10°C temperature change.

With a high resolution Piezo LEGS motor, it is possible to continuously operate in closed loop correcting for thermal changes in other parts of the structure, but one must be able to rely on the encoder readout. All of the encoders discussed here are incremental encoders. They are only giving counting pulses of the encoder resolution when moving. To have an absolute position we need to find a known position where the position is set to zero, or to a desired value. Movement away from this position will then be counted by the driver and the position will be continuously updated. An absolute reference point can be found by the encoder if the scale is equipped with an index mark. The driver can search for the index mark and reset the position when it is encountered.

Electrical Installation The supplier manuals provide information about the correct installation from an electrical point of view. Moving at 10 mm/s with a 5 nm sensor will give 2Â MHz pulses from the encoder. This is a fairly high frequency and the wiring should be made according to the instructions in the supplier manuals. The different parts of the system must be grounded properly. For a complex system with multiple sources of electrical noise, finding the correct grounding may require testing of several solutions.

Encoders are designed to work with a specified supply voltage. Due to power consumption there can be a voltage drop in the wiring to the encoder. This is more likely to occur when operating a high resolution encoder at high speed. Maximum counting frequency of the encoder should be set lower than the maximum counting frequency of the driver. This is to ensure that counting pulses are counted correctly in the driver and that no pulses are lost. Keep in mind that the instantaneous speed can be higher than the average speed.

Operation The motor driving direction and the encoder counting direction can be switched in a particular design. The Motion System software from PiezoMotor will verify this when a new system is setup. If a different software package is used the user must set the direction parameters separately before using the system in closed loop. See the driver manual for details. Failure to set the parameter will result in movement to limit in one direction.

Linear Encoders

Ordering information Readhead and interpolator

PiezoMotor p/n

Renishaw p/n

Note

Tonic™ Resolution 100 nm (i.e. 0.1 µm)

REN-LENC-T-0100

T1001-15A; Ti0200A4A

1.5 m cable

Tonic™ Resolution 5 nm (i.e 0.005 µm)

REN-LENC-T-0005

T1001-15A; Ti4000A4A

1.5 m cable

Driver Connector Cable

PiezoMotor p/n

Renishaw p/n

Note

Cable for PMD101

CK6351-15

1.5 m cable

Cable for PMD206 / PMD236

CK6350-15

1.5 m cable

Scale

PiezoMotor p/n

Renishaw p/n

Note

RGSZ20 Gold Scale with IN-TRACK index mark

REN-SCALE-RZ-100

A-9420-0010

length = 100 mm index mark in center

P Limit

REN-SCALE-LIM-P

A-9653-0138

10 mm magnet, north pole facing

Q limit

REN-SCALE-LIM-Q

A-9653-0139

10 mm magnet, north pole facing

Tape scale end clamps (2 pcs)

REN-SCALE-CLAMP

A-9523-4015

Ordering information Readhead and interpolator

PiezoMotor p/n

MicroE p/n

Note

Mercury II™ 6000 Resolution 100 nm (i.e. 0.1 µm)

MIE-LENC-M-0100

MII6510-AB-200-3-2-0

1 m cable

Mercury II™ 6000 Resolution 5 nm (i.e 0.005 µm)

MIE-LENC-M-0005

MII6710-AB-4000-3-2-0

1 m cable

Driver Connector Cable

PiezoMotor p/n

MicroE p/n

Note

Cable for PMD101

CK6351-15

1.5 m cable 1.5 m cable

Cable for PMD206 / PMD236

CK6350-15

Scale

PiezoMotor p/n

MicroE p/n

Note

PurePrecision™ Laser Tape Scale

MIE-SCALE-TS-100

TS-00100

length = 100 mm

Set of 8 index markers

MIE-SCALE-INDEX

IMS

Set of 4 pairs of limit markers

MIE-SCALE-LIM

LMS

Tape scale end caps (2 pcs)

MIE-SCALE-CAPS

Accessories

PiezoMotor p/n

MicroE p/n

Note

SmartPrecision Alignment Tool

MIE-ACC-ALIGN-EU

ATMII5000-S-EU

with power supply of European standard

SmartPrecision Alignment Tool

MIE-ACC-ALIGN-US

ATMII5000-S-US

with power supply of US standard

Installation Guidelines for LL and LT motors

The Piezo LEGS is a high precision motor. A few simple instructions must be followed in order to get the best performance and lifetime. If the motor is installed poorly both performance as well as life time is severely affected.

Piezo LEGS® Linear 6N

Piezo LEGS® Linear Twin 20N Drive legs - piezo actuators

PRELOAD

Drive rod

Mechanical adapter with sheet metal extender

The Piezo LEGS is a direct drive motor. Proper friction coupling between drive legs and drive rod is essential for optimum performance. When properly installed the motor can position down to the nanometer range without backlash.

Mechanical Notes The motor drive rod must not be subjected to non-axial force – even small loads or torques on the end of the drive rod may cause loss of proper friction contact between drive legs and drive rod. The motor function can be impaired and the motor can be damaged.

✔YES

✘NO

✘NO F

POOR FRICTION CONTACT

Always mount using a mechanical adapter with flexible sheet metal extender so that transverse loads and torques on the drive rod are minimized. Never directly connect the drive rod and moving part in your application (for example when connecting the motor to a linear bearing). Mounting directly will introduce loads large enough for the drive rod to loose proper friction contact.

✘NO

✔YES

Always mount using the intended mounting holes. Do not use the non-threaded holes in motor housing for fastening the motor. Do not clamp the motor.

✔YES

✘NO 4 mounting screws

✘NO

✔YES 2 mounting screws

Installation Guidelines for LL and LT motors

Always align the drive rod so that there are no loads transverse the drive rod axis of motion. Even small angular misalignment may impair motor function.

✔YES

✘NO F

Misalignments in the drive plane are less critical but should be avoided. If the drive rod is aligned poorly there is risk for contact between drive rod and motor housing. Contact may impair function.

✔YES

✘NO

If a mechanical adapter with metal sheet extender cannot be used because of space limitations, we suggest the motor work against a spring loaded linear bearing. Small non axial loads can be reduced by pressing against a spherical surface. Note that angular misalignments may generate non-axial loads resulting in impaired function.

✔YES

✘NO FS

F FS

Installation Guidelines for LL and LT motors

If acceptable, insert a thin piece of hard rubber between drive rod and stage block to remove vibrations.

The drive rod must not be removed from the motor, and it must not be moved to a position where contact with any drive leg is lost. The drive legs can be severely damaged if they are not preloaded while motor is running. Repositioning a drive rod that has come out of place may crack the ceramic drive legs. Contact PiezoMotor for instructions on how to reposition the drive rod.

â&#x153;&#x2DC;NO

Electrical Notes The maximum voltage of +48 V relative to GND must never be exceeded. Overvoltage or reverse polarities can damage the motor. Be careful not to overheat motor! Continuous operation at higher drive frequencies may damage the motor. In non-continuous applications higher drive frequencies may be tolerated, but please consult PiezoMotor in these cases. Twin configured motors must be connected with two motor cables. The two sides of a twin configured motors are run in parallel. Use a Twin Connect Board for proper wiring. When using PiezoMotor drivers, be sure to check driver data sheet or manual for notes on maximum drive frequency for different capacitive loads.

NOTES

150000-01

ABOUT PIEZOMOTOR PiezoMotor is a world-leading developer and manufacturer of direct-drive, micro-motors based on piezoelectric materials. Simple, precise and very small, piezoelectric motors are replacing traditional electromagnetic motors when these fail to meet exacting space/performance demands. Piezo LEGSÂŽ motors minimize total product size and deliver much greater precision. Leading multi-national companies number among our many clients.

PiezoMotor Uppsala AB StĂĽlgatan 14 SE-754 50 Uppsala, Sweden Telephone: +46 18 489 50 00 Fax: +46 18 489 50 01 info@piezomotor.com www.piezomotor.com